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Automated in-line Metrology
for Nanoscale Production

Links

FP7

http://cordis.europa.eu/fp7/

Our project on Cordis

http://cordis.europa.eu/

Nanofutures

http://www.nanofutures.info/

DISSEMINATION

Publications

JOURNAL PAPERS AND PROCEEDINGS

M. Thier, R. Saathof, E. Csencsics, R. Hainisch, A. Sinn, G. Schitter, Design and Control of a Positioning System for robot-based Nanometrology, Automatisierungstechnik; 63/9 727-738 (2015)

R. Koops , M. van Veghel , A. van de Nes, A dedicated calibration standard for nanoscale areal surface texture measurements, Microelectronic Engineering 141, 250-255 (2015).

J. Fraxedas, F. Pérez-Murano , F. Gramazio , M. Lorenzoni , E. Rull Trinidad , U. Staufer, Continuous monitoring of tip radius during atomic force microscopy imaging, SPIE - Scanning Microscopies 2015, 96360O (2015).

R. Koops , M. van Veghel , A. van de Nes, A virtual lateral standard for AFM calibration, Microelectronic Engineering 153, 29-36 (2016).

M. Thier, R. Saathof, R. Hainisch, G. Schitter, Vibration compensation platform for robot-based nanoscale measurements, Proceedings of the 15th international conference of the European society for precision engineering and nanotechnology 211-212 (2015).

F. Cigarini, E. Csencsics, R. Saathof, G. Schitter, Design of tunable damping for precision positioning of a two-body system, Proceedings of the 7th IFAC Symposium on Mechatronic Systems & 15th Mechatronics Forum International Conference (2016)

E. Csencsics, M. Thier, R. Hainisch, G. Schitter, Mechatronic design of an active two-body vibration isolation system, Proceedings of the 7th IFAC Symposium on Mechatronic Systems & 15th Mechatronics Forum International Conference (2016).

M. Thier, R. Saathoof, A . Sinn, R. Hainisch, G. Schitter, Six degree of freedom vibration isolation platform for in-line nano-metrology, Proceedings of the 7th IFAC Symposium on Mechatronic Systems & 15th Mechatronics Forum International Conference (2016).

E. Csencsics, M. Thier, R. Hainisch, G. Schitter System and control design of a voice coil actuated mechanically decoupling two-body vibration isolation system, IEEE/ASME Transactions on Mechatronics;-(2017)

Other Dissemination Events

Date	Type of activities	Main Leader	Title	Place
18.6.13	Oral presentation to a scientific event	TU Delft	Interrogation and Manipulating at the Nanometre Scale - From Scientific Instrumentation to Industrial Applications	Transducer 2013, Barcelona, Spain
10.5.13	Oral presentation to a scientific event	TU Vienna	Precision Engineering for Mechatronic Imaging Systems	Univ. of Southampton, Highfield Southampton
18.7.13	Oral presentation to a scientific event	TU Vienna	Precision Engineering for Mechatronic Imaging Systems	IBM Rüschlikon
16.12.13	Oral presentation to a scientific event	TU Vienna	Präzisiontechnologie: Positionieren, Abbilden un Messen in der Hochtechnologie	Technische Hochschule Deggendorf
27.2.14	Oral presentation to a scientific event	IQS	Modeling in aim4np	LEIT Workshop, Brussels
10.4.14	Posters	TU Delft	Automated in-line Metrology for Nanoscale Production - aim4np	Industrial Technology, Athens
31.8.14	Posters	CSIS	Automated in-line Metrology for Nanoscale Production	ECOSS 30, Antalya, Turkey
23.9.14	Oral presentation to a scientific event	VSL B.V.	A dedicated calibration standard for nanoscale areal surface texture measurements	MNE 2014, Lausanne, Switzerland
28.9.14	Oral presentation to a scientific event	TU Delft	Integrated 6-DoF Lorentz Actuator with Gravity Precision Positioning	22nd International Maglev Conference, Rio de Janeiro, Brazil
10.10.14	Posters	TU Delft	Tip monitoring in Automated AFM	Dutch SPM day 2014 Delft, The Netherlands
12.11.14	Exhibitions	VSL B.V.	Automated in-line Metrology for Nanoscale Production	Precision Fair 2014, Veldhoven, The Netherlands
18.2.15	Oral presentation to a scientific event	TU Vienna	Advanced Mechatronics for Precision Engineering and Mechatronic Imaging Systems	Vienaa Conference on Mathematical Modelling, Vienna, Autria
6.3.15	Oral presentation to a scientific event	TU Vienna	Control in Mechatronic Imaging Systems	Delft, The Netherlands
20.3.15	Oral presentation to a scientific event	TU Vienna	Nanoscale Imaging Systems in Manufacturing	Mauterndorf, Austria
25.3.25	Oral presentation to a scientific event	VSL	Bringing Traceable Nanometrology to the Production Line	High-Tech Systems 2015, 's Hertogenbosch, The Netherlands
18.5.15	Oral presentation to a scientific event	IQS	Simulation of plastic injection for nanostructure pattern replication	PRN2015, DTY, Copenhagen
28.5.15	Oral presentation to a scientific event	TU Vienna	Präzises Positionieren un Messen in der Hochtechnologie	Vienna, Austria
3.6.15	Oral presentation to a scientific event	TU Vienna	Vibration compensation platform for robot-based nanoscale measurements	EUSPEN Conference, Leuven, Belgium
10.6.15	Posters	CSIS	Nanostructured pattern replication on transparent polycarbonate by plastic injection	EuroNanoForum2015, Riga, Latvia
10.6.15	Oral presentation to a scientific event	TU Vienna	Instrumentierung und Regelung für hochauflösende Positionier- un Meßsysteme	Vienna, Austria
31.8.15	Oral presentation to a scientific event	TU Delft	AFM tip monitoring methods based on cantilever higher harmonics vibrations	European Conference on Surface Science (ECOSS31), Barcelona
22.9.15	Oral presentation to a scientific event	Nanoworld Services	High frequency self-sensing piezoresistive SPM cantilevers with a novel design	MNE 2016, Den Haag, The Netherlands
22.9.15	Oral presentation to a scientific event	Nanoworld Services	High frequency self-sensing piezoresistive SPM cantilevers with a novel design	MNE2015, The Hague, The Netherlands
22.9.15	Oral presentation to a scientific event	VSL	A virtual lateral standard for nanoscale calibration	MNE 2015, The Hague, The Netherlands
29.9.15	Oral presentation to a scientific event	CSIS	Continuous monitoring of tip radius during atomic force microscopy imaging	SPIE Scanning Microscopies, Monterey CA, USA
19.11.15	Oral presentation to a scientific event	VSL	Calibration of AFM with virtual standards; robust, versatile and accurate	Precisiebeurs 2015, Veldhoven, The Netherlands
8.12.15	Oral presentation to a scientific event	IQS	Simulation of plastic injection for nanostructure pattern replication	MNC2015, Amsterdam, The Netherlands
8.12.15	Oral presentation to a scientific event	VSL	AFM intergration in production as metrologt tool	MicroNano Conference (MNC 2015), Amsterdam, The Netherlands
15.12.15	Oral presentation to a scientific event	TU Delft	In-situ monitoring of the Atomic Force Microscopy (AFM) tip by analysing the cantilever's high harmonic vibrations	MicroNano Conference (MNC 2015), Amsterdam, The Netherlands
10.3.16	Oral presentation to a scientific event	VSL	Virtual standards for AFM calibration	Nanoscale 2016, Wroclaw, Poland
14.3.16	Oral presentation to a scientific event	CSIS	Continuous monitoring of tip radius during atomic force microscopy imaging	TASC_IOM, Trieste, Italy
30.3.16	Posters	CSIS	Continuous monitoring of tip radius using higher harmonics	6th Multifrequency AFM Conference, Madrid, Spain
5.4.16	Posters	NTC Weiz	Linking the Topography of ag-Nanowire/PEDOT:PSS Blend Films to Electrical Conductivity and Optical Transmittance	Munich
12.4.16	Oral presentation to a scientific event	SIOS Messtechnik	In plane laser-interferometric sensor	Teischnach, Germany
12.4.16	Oral presentation to a scientific event	IQS	Simulation of plastic injection for nano roughness replication	ICME2016, Barcelona
19.5.16	Posters	IQS	Fluent solver expanded to the nano-world	PRN2016, FHNW University of Applied Sciences and Arts Northwestern Switzerland, Windisch, CH
1.6.16	Oral presentation to a scientific event	CSIS	Continuous monitoring of tip radius during atomic force microscopy imaging using higher harmonics	NanoTech France & Nanometrology, Paris, France
22.6.16	Posters	Nanoworld Systems	Self-Sensing High Frequency Probes for Atomic Force Microscopy	Industrial Technologies 2016, Amsterdam, The Netherlands
22.6.16	Posters	Nanosurf AG	Atomic Force Microscope for In-Line Metrology	Industrial Technologies 2016, Amsterdam, The Netherlands
22.6.16	Oral presentation to a scientific event	CSIS	Continuous tip monitoring using higher harmonics	EuroAFMForum, Geneva, Switzerland
22.6.16	Posters	TU Vienna	Metrology Platform to Enable In-Line Nanometrology	Amsterdam, The Netherlands
22.6.16	Posters	NTC Weiz	Linking the Topography of ag-Nanowire/PEDOT:PSS Blend Films to Electrical Conductivity and Optical Transmittance	Amsterdam, The Netherlands
22.6.16	Posters	IQS	Submodelling simulation of plastic injection for nano roughness replication	Industral Technologies 2016, Amsterdam, The Netherlands
22.6.16	Posters	Nanoworld Systems	Self-Sensing High Frequency Probes for Atomic Force Microscopy	Industrial Technology 2016, Amsterdam
22.6.16	Posters	Tu Delft	6-DoF Lorentz Actuator with Gravity Compensator for Precision Positioning	Industrial Technologies 2016, Amsterdam, The Netherlands
22.6.16	Posters	SIOS Messtechnik	Heterodyne Interferometer for In-plane Vibration and Displacement Measurements	Industrial Tehchnology, Amsterdam
22.6.16	Posters	TU Delft	AFM tip monitoring by means of higher harmonics	Industrial Technologies 2016, Amsterdam, The Netherlands
22.6.16	Exhibitions	TU Delft	Automated in-line metrology for nanoscale production	Industrial Technologies 2016, Amsterdam, The Netherlands
24.6.16	Oral presentation to a scientific event	TU Delft	Nanometre Metrology and Characterization in a Pilot Plant or Production Line	Industrial Technology 2016, Amsterdam, The Netherlands
31.8.16	Films	Tu Delft	aim4np[ - Automated In-line Metrology for Nanoscale Production
6.9.16	Posters	TU Vienna	Design of tunable damping for precision positioning of a two-body system	Loughborough, England
6.9.16	Oral presentation to a scientific event	TU Vienna	Six degree of freedom vibration isolation platform for in-line nano metrology	Loughborough, England
6.9.16	Oral presentation to a scientific event	TU Vienna	Mechatronic deisgn of an active two-body vibration isolation system	Loughborough, England
20.9.16	Oral presentation to a scientific event	VSL	Metrology for single nanometer manufacturing	MNE 2016, Vienna, Austria
4-5 oct 2016	Oral presentation to a scientific event	VSL	Reliable nanoscale measurements in the production line (accepted for oral presentation)	DSPE 2016, Sint Michielsgestel, The Netherlands

Highlights

NEW TRANSFER STANDARD FOR CALIBRATING NANOMECHANICAL MEASUREMENTS

Partner VSL has developed a new transfer standard which can be used among others to calibrate atomic force microscopes. It also serves as a standard for Sq values. The standard is unique in its tolerance against contamination and therefore well-suited also for industrial applications in production environments (R. Koops et al, A dedicated calibration standard for nanoscale areal surface texture measurements, Microelectronic Engineering, 141, 250–255 (2015) http://dx.doi.org/10.1016/j.mee.2015.04.021)

FIRST AFM MEASUREMENT CONDUCTED

After having completed the integration of all the actuators, sensors and metrology head, partner TU Vienna has successfully conducted the first AFM measurement from a freely floating metrology platform. One of the first images recorded is shown below. For more information we refer to up-coming publications in scientific journals.

aim4np AFM prototype 3-5

AFM image of a test grating (10µm pitch with 98 nm deep holes) recorded with the first version of the aim4np instrument, operated at high control bandwidth. (Image credit: TU Vienna)

VALIDATION OF THE PROTOTYPE INSTRUMENT IN AN EMULATED PRODUCTION ENVIRONMENT

Under the leadership of the integration partner TU Vienna, the consortium has successfully operated the prototype instrument on different samples that were prepared within the project and which are relevant proxies for the production of plastic-injection moulded nano-surfaces and organic solar cells. A corresponding joint workshop was held in Vienna early July. During that time, also the final dissemination event was prepared.

FINAL REVIEW MEETING

The consortium held its final review meeting end of August. The meeting included a life demo for all consortium partners and advisory board members, during which a prototype instrument mounted on an industrial robot could be observed in operation. The consortium received very good remarks from the advisory committee about the achieved results and about the collaboration and team effort.

The project started on 1st of March 2013. After one month of initiating work in work packges, the kick off meeting was held at the TU Vienna on 3 and 4 April 2013. This date was chosen to present the first results to the partners, the advisory board and the Commission, marking the first Milestone of the project.

Disclaimer

The information in this website is provided as is and no guarantee or warranty is given that the information is fit for any particular purpose. The user thereof uses the information at its sole risk and liability. The opinions expressed in the documents are of the authors only and in no way reflect the European Commission’s opinions.

Consortium Description

The consortium is composed of 4 SME and two large company partners, and knowledge providers from universities and 2 public research centres. They have complementary competences in three different fields of instrumentation, in-line metrology, standardization and traceable measurements, and in two different application fields of thin-film technology. This diversity helps to significantly spread the impact of aim4np over many domains. Many of the participants from these partners had collaborated in the past in national, EU or other international projects, some of them with different affiliations at the time. This ensures that the consortium has enough congruence to enable the synergies needed for successfully completing the complex research tasks.