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DISSEMINATION

 

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Publications

 

JOURNAL PAPERS AND PROCEEDINGS

M. Thier, R. Saathof, E. Csencsics, R. Hainisch, A. Sinn, G. Schitter, Design and Control of a Positioning System for robot-based Nanometrology, Automatisierungstechnik; 63/9 727-738 (2015)

 

R. Koops , M. van Veghel , A. van de Nes, A dedicated calibration standard for nanoscale areal surface texture measurements, Microelectronic Engineering 141, 250-255 (2015).

 

J. Fraxedas, F. Pérez-Murano , F. Gramazio , M. Lorenzoni , E. Rull Trinidad , U. Staufer, Continuous monitoring of tip radius during atomic force microscopy imaging, SPIE - Scanning Microscopies 2015, 96360O (2015).

 

R. Koops , M. van Veghel , A. van de Nes, A virtual lateral standard for AFM calibration, Microelectronic Engineering 153, 29-36 (2016).

 

M. Thier, R. Saathof, R. Hainisch, G. Schitter, Vibration compensation platform for robot-based nanoscale measurements, Proceedings of the 15th international conference of the European society for precision engineering and nanotechnology 211-212 (2015).

 

F. Cigarini, E. Csencsics, R. Saathof, G. Schitter, Design of tunable damping for precision positioning of a two-body system, Proceedings of the 7th IFAC Symposium on Mechatronic Systems & 15th Mechatronics Forum International Conference (2016)

 

E. Csencsics, M. Thier, R. Hainisch, G. Schitter, Mechatronic design of an active two-body vibration isolation system, Proceedings of the 7th IFAC Symposium on Mechatronic Systems & 15th Mechatronics Forum International Conference (2016).

 

M. Thier, R. Saathoof, A . Sinn, R.  Hainisch, G. Schitter, Six degree of freedom vibration isolation platform for in-line nano-metrology, Proceedings of the 7th IFAC Symposium on Mechatronic Systems & 15th Mechatronics Forum International Conference (2016).

 

E. Csencsics, M. Thier, R. Hainisch, G. Schitter System and control design of a voice coil actuated mechanically decoupling two-body vibration isolation system, IEEE/ASME Transactions on Mechatronics;-(2017)

 

 


 
Other Dissemination Events

  

Date Type of activities Main Leader  Title  Place 
18.6.13

Oral presentation

to a scientific event

TU Delft

Interrogation and Manipulating at the Nanometre Scale -

From Scientific Instrumentation to Industrial Applications 

 

Transducer 2013,

Barcelona, Spain

10.5.13

Oral presentation

to a scientific event

 
TU Vienna

Precision Engineering for Mechatronic Imaging Systems 

Univ. of Southampton,

Highfield Southampton 

18.7.13 

Oral presentation

to a scientific event

 

TU Vienna

Precision Engineering for Mechatronic Imaging Systems 

 

IBM Rüschlikon
16.12.13

Oral presentation

to a scientific event

 

TU Vienna

Präzisiontechnologie: Positionieren, Abbilden un Messen

in der Hochtechnologie

Technische Hochschule

Deggendorf

27.2.14 

Oral presentation

to a scientific event

 

IQS

Modeling in aim4np 

LEIT Workshop,

Brussels 

10.4.14 

Posters 

TU Delft 

Automated in-line Metrology for

Nanoscale Production - aim4np

 

Industrial Technology,

Athens 

31.8.14 

Posters 

CSIS 

Automated in-line Metrology for

Nanoscale Production 

 

ECOSS 30,

Antalya, Turkey 

23.9.14 

Oral presentation

to a scientific event

VSL B.V. 

A dedicated calibration standard for nanoscale areal

surface texture measurements

 

MNE 2014,

Lausanne, Switzerland 

28.9.14 

Oral presentation

to a scientific event

 

TU Delft 

Integrated 6-DoF Lorentz Actuator with

Gravity Precision Positioning 

22nd International Maglev

Conference,

Rio de Janeiro, Brazil

 

10.10.14 

Posters 

TU Delft 

Tip monitoring in Automated AFM 

Dutch SPM day 2014

Delft, The Netherlands

 

12.11.14

Exhibitions

VSL B.V.

Automated in-line Metrology for

Nanoscale Production

Precision Fair 2014, 

Veldhoven, The Netherlands

 

18.2.15

Oral presentation

to a scientific event

TU Vienna 

Advanced Mechatronics for Precision

Engineering and Mechatronic Imaging Systems

 

Vienaa Conference on

Mathematical Modelling,

Vienna, Autria

 

6.3.15 

Oral presentation

to a scientific event

 

TU Vienna 

Control in Mechatronic Imaging Systems

Delft, The Netherlands 
20.3.15 

Oral presentation

to a scientific event

 

TU Vienna 

Nanoscale Imaging Systems in Manufacturing

Mauterndorf, Austria 
25.3.25 

Oral presentation

to a scientific event

VSL 

Bringing Traceable Nanometrology

to the Production Line

 

High-Tech Systems 2015,

's Hertogenbosch,

The Netherlands 

 

18.5.15 

Oral presentation

to a scientific event

IQS 

Simulation of plastic injection for

nanostructure pattern replication

 

PRN2015, DTY, Copenhagen 
28.5.15 

Oral presentation

to a scientific event

TU Vienna 

Präzises Positionieren un Messen

in der Hochtechnologie 

 

Vienna, Austria 
3.6.15

Oral presentation

to a scientific event

 

TU Vienna 

Vibration compensation platform for

robot-based nanoscale measurements

EUSPEN Conference,

Leuven, Belgium 

10.6.15 

Posters

CSIS 

Nanostructured pattern replication on

transparent polycarbonate by plastic injection

 

EuroNanoForum2015,

Riga, Latvia 

10.6.15 

Oral presentation

to a scientific event

TU Vienna 

Instrumentierung und Regelung für

hochauflösende Positionier- un Meßsysteme

 

Vienna, Austria 
31.8.15 

Oral presentation

to a scientific event

 

TU Delft 

AFM tip monitoring methods based on

cantilever higher harmonics vibrations

European Conference

on Surface Science

(ECOSS31), Barcelona

 

22.9.15

Oral presentation

to a scientific event

 

Nanoworld

Services 

High frequency self-sensing piezoresistive

SPM cantilevers with a novel design 

MNE 2016,

Den Haag, The Netherlands 

22.9.15 

Oral presentation

to a scientific event

 

Nanoworld

Services 

High frequency self-sensing piezoresistive

SPM cantilevers with a novel design 

 

MNE2015, The Hague,

The Netherlands 

22.9.15 

Oral presentation

to a scientific event

  

VSL 

A virtual lateral standard for nanoscale calibration 

MNE 2015, The Hague,

The Netherlands 

29.9.15 

Oral presentation

to a scientific event

 

CSIS 

Continuous monitoring of tip radius

during atomic force microscopy imaging 

SPIE Scanning Microscopies,

Monterey CA, USA 

19.11.15

Oral presentation

to a scientific event

 

VSL 

Calibration of AFM with virtual standards;

robust, versatile and accurate

Precisiebeurs 2015, Veldhoven,

The Netherlands 

8.12.15 

Oral presentation

to a scientific event

 

IQS 

Simulation of plastic injection for nanostructure

pattern replication

MNC2015, Amsterdam,

The Netherlands 

8.12.15 

Oral presentation

to a scientific event

 

VSL 

AFM intergration in production as metrologt tool

MicroNano Conference (MNC 2015),

Amsterdam, The Netherlands 

15.12.15 

Oral presentation

to a scientific event

 

TU Delft 

In-situ monitoring of the Atomic Force Microscopy

(AFM) tip by analysing the cantilever's high harmonic

vibrations

 

MicroNano Conference (MNC 2015),

Amsterdam, The Netherlands 

 
10.3.16 

Oral presentation

to a scientific event

 

VSL 

Virtual standards for AFM calibration

Nanoscale 2016,

Wroclaw, Poland 

14.3.16 

Oral presentation

to a scientific event

 

CSIS 

Continuous monitoring of tip radius during atomic

force microscopy imaging

TASC_IOM,

Trieste, Italy 

30.3.16 

Posters 

CSIS

Continuous monitoring of tip radius using

higher harmonics 

 

6th Multifrequency AFM Conference,

Madrid, Spain 

5.4.16 

Posters 

NTC Weiz 

Linking the Topography of

ag-Nanowire/PEDOT:PSS Blend Films to

Electrical Conductivity and Optical Transmittance 

 

Munich 
12.4.16 

Oral presentation

to a scientific event

  

SIOS

Messtechnik

In plane laser-interferometric sensor 

Teischnach, Germany 
12.4.16 

Oral presentation

to a scientific event

  

IQS 

Simulation of plastic injection for nano

roughness replication 

ICME2016, Barcelona 
19.5.16 

Posters 

IQS 

Fluent solver expanded to the nano-world 

 

PRN2016, FHNW

University of Applied Sciences

and Arts Northwestern Switzerland,

Windisch, CH

 

1.6.16 

Oral presentation

to a scientific event

 

CSIS 

Continuous monitoring of tip radius during atomic

force microscopy imaging using higher harmonics 

NanoTech France & Nanometrology,

Paris, France 

22.6.16 

Posters 

Nanoworld

Systems

 

Self-Sensing High Frequency Probes for Atomic

Force Microscopy

Industrial Technologies 2016,

Amsterdam, The Netherlands 

22.6.16 

Posters 

Nanosurf AG

 

Atomic Force Microscope for In-Line Metrology 

Industrial Technologies 2016,

Amsterdam, The Netherlands

 

22.6.16

Oral presentation

to a scientific event

  

CSIS 

Continuous tip monitoring using higher harmonics 

EuroAFMForum,

Geneva, Switzerland 

22.6.16 

Posters

TU Vienna 

Metrology Platform to Enable In-Line Nanometrology

Amsterdam, The Netherlands

 

22.6.16 

Posters

NTC Weiz 

Linking the Topography of

ag-Nanowire/PEDOT:PSS Blend Films to

Electrical Conductivity and Optical Transmittance 

 

Amsterdam, The Netherlands 
22.6.16 

Posters

IQS 

Submodelling simulation of plastic injection for 

nano roughness replication

Industral Technologies 2016,

Amsterdam, The Netherlands

 

22.6.16 

Posters

Nanoworld

Systems 

 

Self-Sensing High Frequency Probes for Atomic

Force Microscopy

Industrial Technology 2016,

Amsterdam 

22.6.16 

Posters

Tu Delft 

6-DoF Lorentz Actuator with Gravity Compensator

for Precision Positioning

 

Industrial Technologies 2016,

Amsterdam, The Netherlands 

22.6.16 

Posters

SIOS

Messtechnik 

Heterodyne Interferometer for In-plane Vibration

and Displacement Measurements

Industrial Tehchnology,

Amsterdam

 

22.6.16 

Posters 

TU Delft 

AFM tip monitoring by means of higher harmonics 

Industrial Technologies 2016,

Amsterdam, The Netherlands

 

22.6.16 

Exhibitions 

TU Delft 

Automated in-line metrology for nanoscale production 

Industrial Technologies 2016,

Amsterdam, The Netherlands

 

24.6.16 

Oral presentation

to a scientific event

 

TU Delft 

Nanometre Metrology and Characterization in a Pilot

Plant or Production Line 

Industrial Technology 2016,

Amsterdam, The Netherlands 

31.8.16 

Films 

Tu Delft 

aim4np[ - Automated In-line Metrology for

Nanoscale Production

 

 
6.9.16 

Posters 

TU Vienna 

Design of tunable damping for precision positioning

of a two-body system

 

Loughborough, England 
6.9.16

Oral presentation

to a scientific event 

TU Vienna 

Six degree of freedom vibration isolation platform

for in-line nano metrology

 

Loughborough, England 
6.9.16 

Oral presentation

to a scientific event

TU Vienna 

Mechatronic deisgn of an active two-body vibration

isolation system

 

Loughborough, England 
20.9.16 

Oral presentation

to a scientific event

 

VSL 

Metrology for single nanometer manufacturing

MNE 2016,

Vienna, Austria 

4-5 oct 2016 

Oral presentation

to a scientific event

VSL 

Reliable nanoscale measurements in the

production line (accepted for oral presentation)

DSPE 2016, Sint Michielsgestel,

The Netherlands

 

 

 

 

 

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